輻射測厚儀測量精度分析與誤差補償技術(shù)

朱建芳[1] 梁煦宏[2][1]廣州航海高等專科學(xué)校,廣州510725 [2]廣東省測試分析研究所,廣州510070
摘　要:簡單介紹了透射式輻射測厚原理,分析與研究了影響輻射測厚儀測量精度的各種因素.為了保證和提高測量精度,利用分段多項式曲線擬合與查表線性插值相結(jié)合的方法實現(xiàn)非線性補償,利用軟件查表法對測量氣隙進行動態(tài)的溫度補償,利用內(nèi)藏標樣進行動態(tài)自動校正以實現(xiàn)綜合誤差補償.實際應(yīng)用表明,輻射測厚儀經(jīng)過上述誤差補償后,測量范圍廣、測量精度高、性能穩(wěn)定可靠、應(yīng)用廣泛.[著者文摘]

Accuracy Analysis and Error Compensation Technique of the Radiation Thickness GaugeZhu Jianfang, Liang Xuhong　Zhu Jianfang, Liang Xuhong　Abstract:The measuring principle of a transmissive radiation thickness gauge is introduced briefly. The factors that may influence the accuracy of the gauge are studied and analyzed. To ensure and improve the measurement accuracy,piecewise polynomial curve fitting method combined with table searching and linear interpolation is used to implement the non-linearity compensation. The software table searching method is used to implement dynamic temperature compensation for the measuring air gap,and internal sampling for automatic dynamic adjustment is adopted to implement integrated error compensation. The results of practical operation show that the thickness gauge with above compensations offers wide t range, high measurement accuracy, stable performance, and various applicable areas.[著者文摘]

Key words:Radiation thickness gauge Error compensation Sensitivity Non-linearity compensation