高阻計(jì)/靜電計(jì)檢定裝置的建立及不確定度評(píng)定

王曉敏
中國(guó)工程物理研究院計(jì)量測(cè)試中心,四川綿陽(yáng)621900
摘　要:為了實(shí)現(xiàn)對(duì)高阻計(jì)靜電計(jì)準(zhǔn)確、可靠的校準(zhǔn)／檢定，特建立高阻計(jì)，靜電計(jì)檢定裝置。該檢定裝置由KEITHLEY 263校準(zhǔn)儀，源組成，采用直接測(cè)量法進(jìn)行校準(zhǔn)，檢定工作。通過(guò)對(duì)其測(cè)量不確定度進(jìn)行詳細(xì)評(píng)定，證明高阻計(jì)，靜電計(jì)檢定裝置可圓滿地實(shí)現(xiàn)對(duì)KEITHLEY 6517A等高精密靜電計(jì)，高阻計(jì)的校準(zhǔn)／檢定，從而大大增強(qiáng)了電磁學(xué)計(jì)量領(lǐng)域高值電阻和微電流等參數(shù)的測(cè)試能力。[著者文摘]


Establishment and uncertainty evaluation of high resistance meter/electrometer verification equipmentWANG Xiao-min Metrology and Testing Center,China Academy of Engineering Physics,Mianyang 621900,ChinaAbstract:The high resistance meter ＆ electrometer verification equipment was set up in order to achieve accurate and reliable calibration and verification of high resistance meter ＆ electrometer. The high resistance meter ＆ electrometer verification equipment was formed by the KEITHLEY 263 Calibrator ＆ Source. The calibration ＆ verification work used the method of direct measurement. The accurate evaluation of uncertainty indicated that the high resistance meter ＆ electrometer verification equipment could achieve accurate calibration ＆ verification for KEITHLEY6517A, etc. This greatly increased the test ability of high-value resistors and micro-current in the electromagnetic measurement fields.[著者文摘]

Key words:High resistance meter ＆ electrometer verification equipment; Calibration ＆ verification; Direct measurement; Uncertainty ; Evaluation