Design of micro-acceleration sensor with impact resistance and high-temperature resistanceXU Chun-xiao, FANG Li-qing, ZHOU Xin-wei1. Department of Gun Engineering, Ordnance Engineering College, Shijiazhuang 050003, China;2. 71345 Unit of PLA, Zibo 255000, ChinaAbstract:A sort of SOI micro-acceleration sensor which can endure high temperature （400℃） and overload （20000 gn）are designed, the manufacture and technique of its are introduced, emulation is carried on applying ANSYS. The range, ability to endure impact, sensitivity, sensitivity of landscape orientation, linearity of the sensor are discussed, the results prove the sensor can satisfy the request which is put forward when being designed.[著者文摘]
